Butterfly Network, Inc.
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
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Abstract:
CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.
Status:
Application
Type:
Utility
Filling date:
30 Oct 2020
Issue date:
22 Apr 2021