Butterfly Network, Inc.
MICROMACHINED ULTRASONIC TRANSDUCER DEVICES HAVING TRUNCATED CIRCLE SHAPED CAVITIES

Abstract:

An ultrasonic transducer device is provided. In some embodiments, the ultrasonic transducer device includes a substrate having a membrane support layer formed on a bottom cavity layer, and an opening in the membrane support layer so as to form a transducer cavity. In some embodiments, the opening comprises a truncated circle shape.