Butterfly Network, Inc.
ULTRASOUND DEVICE WITH PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS

Abstract:

Ultrasound devices including piezoelectric micromachined ultrasonic transducers (PMUTs) are described. Frequency tunable PMUT arrays are provided. The PMUTs may be formed on the same substrate or a different substrate than an integrated circuit substrate. The PMUTs may be formed in a variety of ways and from various suitable piezoelectric materials.