Camtek Ltd.
AUTOMATIC DEFECT CLASSIFICATION

Abstract:

A method for automatic defect classification, the method may include acquiring, by a first camera, at least one first image of at least one area of an object; processing the at least one first image to detect a group of suspected defects within the at least one area; performing a first classification process for initially classifying the group of suspected defects; determining whether a completion of a classification of the first subgroup of the suspected defects requires additional information from a second camera; when determining that the first subgroup of the suspected defects requires additional information from the second camera then: acquiring second images, by the second camera while applying image acquisition parameters of the second camera, to provide the additional information; and performing the second classification process for classifying the first subgroup of suspected defects.