Camtek Ltd.
CROSS TALK REDUCTION

Abstract:

A method for detecting cross talk, that may include acquiring a first image of a region of interest (ROI) of a wafer by illuminating the ROI with a first oblique beam, and collecting light reflected from the ROI; acquiring a second image of the ROI by illuminating the ROI with a second oblique beam, and collecting light reflected from the ROI; wherein a orthogonal projection of the first oblique beam on the wafer is oriented to a orthogonal projection of the second oblique beam on the wafer; and detecting cross talk that appears in at least one of first image of the region and the second image of the region.