Cadence Design Systems, Inc.
Finding intersections of planar parametric curves based on error-controlled discretization

Abstract:

A method includes finding, for a discretized curve comprising multiple segments, first and second segments that are closer than a threshold. The method includes determining an intersection point of the first segment and the second segment, the intersection point associated with a first parameter value for the first segment and a second parameter value for the second segment, determining an error value as a distance between a first point in the parametric curve corresponding to the first parameter value and a second point in the parametric curve corresponding to the second parameter value, and selecting the intersection point when the error value is smaller than a precision tolerance. The method includes transforming the discretized curve by removing at least a segment between the first segment and the second segment, and providing the discretized curve to manufacture a mask for reproducing the feature in the integrated circuit.