Cadence Design Systems, Inc.
Generating width spacing patterns for multiple patterning processes using instances
Last updated:
Abstract:
Embodiments according to the present disclosure relate to physically implementing an integrated circuit design while conforming to the requirements of complex color based track systems, and using information about instances that have been included in the design. In particular, the present embodiments allow for the automatic creation of WSPs by examining heights and placement orientations of instances, along with the width, spacing, and colors of instance pins and blockages. In these and other embodiments, techniques are provided for filling gaps between generated tracks, as well as for generating tracks to account for the possibility of flipped or mirrored instances.
Status:
Grant
Type:
Utility
Filling date:
16 Jan 2018
Issue date:
4 Aug 2020