Cadence Design Systems, Inc.
Error-controlled discretization of parametric curves for integrated circuit design and manufacture

Abstract:

A method including receiving a parametrized curve indicative of a feature in an integrated circuit is provided. The method includes selecting a first parameter value associated with a first point in the parametrized curve, determining a pre-selected number of derivative values in a Taylor series for the parametrized curve at the first point, and determining a second parameter value for a second point in the parametrized curve based on the pre-selected number of derivative values. The method also includes determining a threshold error value between a straight segment joining the first point and the second point, and the parametrized curve, modifying the second parameter value based on the threshold error value and a pre-selected tolerance, transforming the parametrized curve into a discretized segmentation that comprises the straight segment joining the first point and the second point, and providing the discretized segmentation of the parametrized curve to manufacture a mask for reproducing the feature in the integrated circuit.