Ciena Corporation
Silicon-based modulator with optimized doping profile
Last updated:
Abstract:
A silicon modulator where the doping profile varies along the lateral and/or longitudinal position in the transition zones to achieve improved performance in terms of either optical attenuation or contact access resistance or both. A silicon-based modulator includes a waveguide including a contact region and a core region, wherein the waveguide includes a dopant concentration that decreases from the contact region to the core region in a transition zone according to a doping profile that is variable.
Status:
Application
Type:
Utility
Filling date:
2 May 2022
Issue date:
18 Aug 2022