Cree, Inc.
POWER SEMICONDUCTOR DEVICES WITH IMPROVED OVERCOAT ADHESION AND/OR PROTECTION

Abstract:

A power semiconductor device includes a semiconductor layer structure and a protective overcoating on a bonding surface of the semiconductor layer structure. The bonding surface includes a plurality of adhesion features along an interface with the protective overcoating. The adhesion features protrude from and/or are recessed in the bonding surface, and define an adhesion strength between the bonding surface and the protective overcoating that spatially varies along the interface. Related devices and fabrication methods are also discussed.