CyberOptics Corporation
WAFER-LIKE SENSOR

Last updated:

Abstract:

A wafer-like semiconductor sensor includes a wafer-like base formed of a plurality of layers of chemically-hardened glass and an electronics module mounted to a recessed pocket in the base and containing a sensor.

Status:
Application
Type:

Utility

Filling date:

8 Nov 2019

Issue date:

14 May 2020