CyberOptics Corporation
WAFER-LIKE SENSOR
Last updated:
Abstract:
A wafer-like semiconductor sensor includes a wafer-like base formed of a plurality of layers of chemically-hardened glass and an electronics module mounted to a recessed pocket in the base and containing a sensor.
Status:
Application
Type:
Utility
Filling date:
8 Nov 2019
Issue date:
14 May 2020