EMCORE Corporation
Electrically conductive metal film for a semiconductor device

Abstract:

A semiconductor device comprises a device substrate and a metal film, with first and second non-recessed areal regions separated by a recessed areal region. The metal film covers contiguously the recessed and non-recessed areal regions and transition surfaces joining them. A first transition surface includes metallized portions over which (i) the first transition surface is not parallel to the other transition surface, (ii) the first transition surface is inclined relative to the device substrate, and (iii) the metal film on the first transition surface is contiguous with adjacent metal film portions on the recessed and non-recessed areal regions. A portion of an optoelectronic device surface running parallel to an optical waveguide of the device can be left exposed by a metal film on the device. Light propagating transversely out of the waveguide through the exposed portion can be detected, measured, or imaged for non-destructive device characterization or testing.