Entegris, Inc.
YTTRIUM FLUORIDE FILMS AND METHODS OF PREPARING AND USING YTTRIUM FLUORIDE FILMS

Abstract:

Described are yttrium fluoride compositions, including deposited films, e.g., coatings, that contain yttrium fluoride; methods of preparing yttrium fluoride compositions and deposited film coatings that contain yttrium fluoride; as well as substrates that have a deposited film coating that contains yttrium fluoride at a surface and methods and equipment that include the substrates.