Entegris, Inc.
METHOD OF PREPARING IODOSILANES AND COMPOSITIONS THEREFROM

Abstract:

Provided are complexes useful in the conversion of chloro- and bromo-silanes to highly desired iodosilanes such as H.sub.2SiI.sub.2 and HSiI.sub.3, via a halide exchange reaction. The species which mediates this reaction is an iodide reactant comprising aluminum.