Entegris, Inc.
ELECTROSTATIC CHUCK HAVING A GAS FLOW FEATURE, AND RELATED METHODS
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Abstract:
Described are electrostatic chucks designed for use in supporting a workpiece during a workpiece processing step, the electrostatic chuck including a gas flow system.
Status:
Application
Type:
Utility
Filling date:
11 May 2021
Issue date:
11 Nov 2021