Entegris, Inc.
RETICLE POD SEALING

Abstract:

A pod includes a cover with a cover body, a baseplate with a baseplate body, and one or more seal surfaces. The one or more seal surfaces are formed on one or more of the baseplate body and the cover body to provide sealing. A method of producing a reticle pod includes forming one or more seal surfaces on at least one of a baseplate body of a baseplate and a cover body of a cover. The one or more seal surfaces are formed to provide sealing between the baseplate and the cover. Each of the one or more seal surfaces includes a wear-resistant outermost coating with a Rockwell C hardness of about or greater than 70.