Entegris, Inc.
CONNECTION ASSEMBLY AND FILTER ASSEMBLY

Abstract:

A connection assembly includes a manifold configured to attach a removable cartridge and a connector pipe with a flange. The flange is disposed between an upper plate and a lower plate of the manifold and has a width that prevents tilting of the connector pipe at greater than a maximum tilt angle. The connector pipe is configured to be inserted into a port of the removable cartridge in which an O-ring is compressed between the connector and the port. A filter assembly includes a manifold, a filter removably attached to the manifold, a connector pipe with a flange disposed between an upper plate and a lower plate of the manifold, and an O-ring. The O-ring is compressed between the connector pipe and the port.