Entegris, Inc.
Storage and Delivery Veseel for Storing GeH4, Using a Zeolitic Adsorbent

Abstract:

Described are storage and dispensing systems and related methods, for the selective dispensing germane (GeH.sub.4) as a reagent gas from a vessel in which the germane is held in sorptive relationship to a solid adsorbent medium that includes a zeolitic imidazolate framework.