Entegris, Inc.
Adsorbent-based, mechanically-regulated gas storage and delivery vessel
Last updated:
Abstract:
Described are storage and dispensing vessels and related systems and methods, for dispensing reagent gas from a vessel in which the reagent gas is held in sorptive relationship to a solid adsorbent medium, the reagent gas being contained at super-atmospheric pressure and the solid adsorbent medium comprising a metal-organic framework.
Status:
Grant
Type:
Utility
Filling date:
4 Apr 2019
Issue date:
17 May 2022