Entegris, Inc.
MODIFIED CARBON ADSORBENTS

Last updated:

Abstract:

Provided are certain activated carbonaceous materials which have been treated with dilute mineral acids to modify their surface chemistry and morphology. The modified activated carbonaceous materials of the disclosure are useful in removing certain contaminants from gaseous streams. In one embodiment, the contaminants are compounds containing silicon and oxygen moieties, such as alkyl silanols and alkyl siloxanes. The modified activated carbonaceous materials can be incorporated into filters and filter systems.

Status:
Application
Type:

Utility

Filling date:

10 Nov 2021

Issue date:

19 May 2022