Entegris, Inc.
METHOD FOR PREPARING IODOSILANES

Abstract:

Provided is methodology for the preparation of highly-desired iodosilanes such as H.sub.2SiI.sub.2 and HSi.sub.3, via a reaction of alkylaminosilanes with certain substituted acid iodides. In one embodiment, bis(diethylamino)silane is reacted with benzoyl iodide to provide diiodosilane.