Entegris, Inc.
COATED POROUS POLYMERIC MEMBRANES
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Abstract:
The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.
Status:
Application
Type:
Utility
Filling date:
9 Nov 2021
Issue date:
5 May 2022