Entegris, Inc.
SPIRALING POLYPHASE ELECTRODES FOR ELECTROSTATIC CHUCK
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Abstract:
Electrostatic chucks include multiple electrodes, each having a spiral shape surrounding a center of a surface of the electrostatic chuck, to provide a polyphase electrostatic chuck. Each electrode can be connected to a different phase of power. The spiral shapes can each avoid one another as well as avoiding holes or openings in the surface of the electrostatic chuck. The spiral shapes can be algorithmically determined using a processor. These electrostatic chucks can include three or more electrodes. Methods of manufacture of the electrostatic chucks include determining shapes for each of the electrodes and providing each of the electrodes.
Status:
Application
Type:
Utility
Filling date:
15 Dec 2020
Issue date:
16 Jun 2022