Entegris, Inc.
ELECTROSTATIC CHUCK PREPARED BY ADDITIVE MANUFACTURING, AND RELATED METHODS AND STRUCTURES

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Abstract:

Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.

Status:
Application
Type:

Utility

Filling date:

21 Dec 2021

Issue date:

30 Jun 2022