Entegris, Inc.
ELECTROSTATIC CHUCK PREPARED BY ADDITIVE MANUFACTURING, AND RELATED METHODS AND STRUCTURES
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Abstract:
Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.
Status:
Application
Type:
Utility
Filling date:
21 Dec 2021
Issue date:
30 Jun 2022