Entegris, Inc.
GAS STORAGE SYSTEMS AND METHOD THEREOF
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Abstract:
Described are gas storage medium and methods of storing source gases in the gas storage medium, particularly relating to using hydroxylated metal oxides or hydroxylated metalloid oxides as a storage medium for storing diborane.
Status:
Application
Type:
Utility
Filling date:
14 Dec 2021
Issue date:
23 Jun 2022