Entegris, Inc.
GAS STORAGE SYSTEMS AND METHOD THEREOF

Last updated:

Abstract:

Described are gas storage medium and methods of storing source gases in the gas storage medium, particularly relating to using hydroxylated metal oxides or hydroxylated metalloid oxides as a storage medium for storing diborane.

Status:
Application
Type:

Utility

Filling date:

14 Dec 2021

Issue date:

23 Jun 2022