Entegris, Inc.
Fluid circuit with integrated electrostatic discharge mitigation

Abstract:

A fluid circuit (160) defining a flow path for a fluid from a fluid supply (152) toward a process stage (156). The fluid circuit may include a plurality of operative components (168) including a body portion (182) and a plurality of tubing connector fittings (186). The operative components may be connected by a plurality of tubing segments (164). Each body portion may include a non-conductive fluoropolymer portion and an outer conductor (234) that extends between each of the plurality of tubing connector fittings and that is unitary with the non-conductive fluoropolymer portion. The plurality of tubing segments may include a non-conductive fluoropolymer tubing portion (187) and an axial strip (188) of conductive polymer. The outer conductor of each body portion conductively connected with tubing segments connected thereto. Each of the connectors may include a bridging component (262) for conductively connecting the respective outer conductor of the body portion to the strip of conductive polymer of the connecting tubing segments.