Entegris, Inc.
Chemical resistant multi-layer coatings applied by atomic layer deposition
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Abstract:
Described are multi-layer coatings, substrates (i.e., articles) coated with a multi-layer coating, and methods of preparing a multi-layer coating by atomic layer deposition, wherein the coating includes layers alumina and yttria.
Status:
Grant
Type:
Utility
Filling date:
18 Dec 2018
Issue date:
19 Jul 2022