Entegris, Inc.
Chemical resistant multi-layer coatings applied by atomic layer deposition

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Abstract:

Described are multi-layer coatings, substrates (i.e., articles) coated with a multi-layer coating, and methods of preparing a multi-layer coating by atomic layer deposition, wherein the coating includes layers alumina and yttria.

Status:
Grant
Type:

Utility

Filling date:

18 Dec 2018

Issue date:

19 Jul 2022