Entegris, Inc.
PROCESS FOR PREPARING ORGANOTIN COMPOUNDS
Last updated:
Abstract:
Provided is a facile methodology for preparing certain organotin compounds having alkyl and alkylamino or alkyl and alkoxy substituents. The process provides the organotin compounds in a highly pure form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.
Status:
Application
Type:
Utility
Filling date:
28 Jan 2022
Issue date:
4 Aug 2022