Entegris, Inc.
PROCESS FOR PREPARING ORGANOTIN COMPOUNDS

Last updated:

Abstract:

Provided is a facile methodology for preparing certain organotin compounds having alkyl and alkylamino or alkyl and alkoxy substituents. The process provides the organotin compounds in a highly pure form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.

Status:
Application
Type:

Utility

Filling date:

28 Jan 2022

Issue date:

4 Aug 2022