Entegris, Inc.
HANDLE FOR WAFER CARRIER
Last updated:
Abstract:
A handle for a wafer carrier that includes an insertable member configured to be inserted into an aperture of the wafer carrier, and a locking mechanism moveable relative to the insertable member. A tab of the insertable member retains the insertable member in the aperture when in an engaged state. When in a locked state, the locking mechanism maintains the tab in the engaged state and a flexible member of the locking mechanism is positioned to maintain the locking mechanism in the locked state. A wafer carrier includes the detachable handle and the locking mechanism.
Status:
Application
Type:
Utility
Filling date:
20 May 2020
Issue date:
21 Jul 2022