Entegris, Inc.
Substrate container with latching mechanism having two cam profiles

Abstract:

A door of a substrate container includes a latching mechanism for operating at least two latch members. The substrate container can be a front opening substrate container or a bottom opening substrate container. The latching mechanism can include a rotatable cam having a first rotational profile out of phase with a second rotational profile such that when the cam is rotated to operate the latch mechanism from the disengaged position to the engaged position, a first latch member engages a first corresponding slot in a door frame prior to a second latch member engaging a second corresponding opening provided in the door frame such that the latch members are operated in a staggered manner. This staggered latching configuration allows for the application of a load provided by the system to be used in the most efficient manner per latch arm or per set of latch arms.