Entegris, Inc.
Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame

Abstract:

Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.