Entegris, Inc.
Silicon carbide filter membrane and methods of use
Last updated:
Abstract:
Described are silicon carbide filters for use with liquid metals such as liquid tin, as well as methods of using such a filter to remove particles from the liquid metal, and systems and processes that use the filtered liquid metal.
Status:
Grant
Type:
Utility
Filling date:
5 Jul 2018
Issue date:
19 Jan 2021