Entegris, Inc.
Bottom opening pod with magnetically coupled casssettes

Abstract:

A bottom opening pod utilizing magnetic coupling for securing one or more cassettes within. The pod includes magnetic couplers that provide magnetic coupling between the cassette(s) and the bottom door of the pod. The magnetic couplers may include magnetic elements disposed on a base of the cassette and on the bottom door of the pod. The magnetic coupling secures the cassette(s) to the bottom door without imposition of separation forces between the housing and the bottom door of the pod.