Entegris, Inc.
Cyclopentadienyl titanium alkoxides with ozone activated ligands for ALD of TiO2

Abstract:

An organotitanium compound selected from the group consisting of: (i) organotitanium compounds of Formulae (I): ##STR00001## wherein: each of R.sup.0, R.sup.1 and R.sup.2 is the same as or different from the others, and each is independently selected from organo substituents containing olefinic or alkynyl unsaturation; and each of R.sup.3, R.sup.4, R.sup.5, R.sup.6, and R.sup.7 is the same as or different from the others, and each is independently selected from H, C.sub.1-C.sub.12 alkyl, and substituents containing olefinic or alkynyl unsaturation; (ii) organotitanium compounds including at least one tris(alkylaminoalkyl)amine ligand and at least one dialkylamine ligand, wherein alkyl is C.sub.1-C.sub.6 alkyl; and (iii) organotitanium compounds including a cyclopentadienyl ligand, and a cyclic dienyl or trienyl ligand other than cyclopentadienyl Such organotitanium compounds are usefully employed in vapor deposition processes for depositing titanium on substrates, e.g., in the manufacture of microelectronic devices and microelectronic device precursor structures.