Entegris, Inc.
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt

Abstract:

The present disclosure relates to a bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors, and ultra high purity versions thereof, methods of making, and methods of using these bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors in a vapor deposition process. One aspect of the disclosure relates to an ultrahigh purity bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursor of the formula Co.sub.2(CO).sub.6(R.sup.3C.ident.CR.sup.4), where R.sup.3 and R.sup.4 are different organic moieties and R.sup.4 is more electronegative or more electron withdrawing compared to R.sup.3.