Entegris, Inc.
Aminoiodosilanes and methods of synthesizing these aminoiodosilanes

Abstract:

Methods of synthesizing aminoiodosilanes are disclosed. The reaction to produce the disclosed aminoiodosilanes is represented by the formula: SiI.sub.4+z(NH.sub.2R.sup.1)=SiI.sub.y(NHR.sup.1).sub.z, wherein R.sup.1 is selected from a C.sub.1-C.sub.10 alkyl or cycloalkyl, aryl, or a hetero group; y=1 to 3; and z=4-y.