Entegris, Inc.
Index of refraction sensor system with dual mode temperature control

Abstract:

A sensor system (100) utilizes temperature control systems (262) and methods to achieve and maintain a sample in a sample chamber (110) at a sampling temperature. Such sensor systems and methods may employ a dual mode temperature controller including a spike mode (SMC) controller (274) and a proportional-integral-derivative (PID) mode controller (272). Based on a temperature of the sample, the temperature controller of the sensor system can initially enter the spike mode or the PID mode.