Entegris, Inc.
ACCURATE TEMPERATURE READING OF FLUID NEAR INTERFACE

Abstract:

Systems and methods for determining temperature or temperature related variables using a sensor having a measurement surface include a sensor body having one or more walls and containing an intermediary material, a window providing a measurement surface, a first temperature sensor obtaining a first temperature at or near the window, a second temperature sensor located within the intermediary material, and a processor configured to receive the first temperature and the second temperature and determine a temperature adjustment based on those temperatures. The temperature adjustment can be used to adjust a value of a temperature related variable based on the temperature at the measurement surface, for example for calculating a refractive index of a fluid. Additional temperature sensors may be included and further included in the determination of the temperature adjustment.