Entegris, Inc.
MEMBRANES WITH REDUCED PARTICLE FORMATION
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Abstract:
Disclosed herein are membranes having a first surface, a second surface opposing the first surface, a skin at the first surface having visible pores when viewed at a magnification of 10,000 and a pore size gradient, wherein pore size increases from the second surface to the skin.
Status:
Application
Type:
Utility
Filling date:
21 Sep 2020
Issue date:
1 Apr 2021