Entegris, Inc.
DIFFUSION BARRIERS MADE FROM MULTIPLE BARRIER MATERIALS, AND RELATED ARTICLES AND METHODS

Abstract:

Described are diffusion barriers that are effective to inhibit the flow and release of impurities present in a solid material, from a surface of the solid material, as well articles having a diffusion barrier on a surface thereof, methods of preparing articles that include a diffusion barrier on a surface, equipment that includes an article having a diffusion barrio on a surface, and methods of using the articles and equipment; the diffusion barrier include at least two different barrier materials.