Entegris, Inc.
VALVE AND VALVE MEMBER FOR CONTROLLING FLUID FLOW

Abstract:

This application provides a valve member that includes a diaphragm portion and a valve head attachable to the diaphragm portion. The valve head includes an engagement portion configured to engage with a valve seat defined in the valve. The engagement portion is formed of a melt processable material that contains at least one fluoropolymer. The diaphragm portion is formed of a material that is non-melt processable and contains at least one fluoropolymer. This application also provides a valve that includes the valve member and a passageway with the valve seat. The valve head is configured to be moveable relative to the valve seat.