Entegris, Inc.
ADSORBENT-BASED, MECHANICALLY-REGULATED GAS STORAGE AND DELIVERY VESSEL

Abstract:

Described are storage and dispensing vessels and related systems and methods, for dispensing reagent gas from a vessel in which the reagent gas is held in sorptive relationship to a solid adsorbent medium, the reagent gas being contained at super-atmospheric pressure and the solid adsorbent medium comprising a metal-organic framework.