Entegris, Inc.
MOLDS THAT INCLUDE A CERAMIC MATERIAL SURFACE, AND RELATED METHODS FOR MAKING AND USING THE MOLDS

Abstract:

Described are molds that include a ceramic material at a surface, as well as methods of forming the molds, and methods of using the molds; the ceramic material is constituted substantially, mostly, or entirely of three elemental components designated M, A, and X; the "M" component is at least one transition metal; the "A" component is one or a combination of Si, Al, Ge, Pb, Sn, Ga, P, S, In, As, Tl, and Cd; and the "X" component is carbon, nitrogen, or a combination thereof.