Entegris, Inc.
REGULATOR STABILITY IN A PRESSURE REGULATED STORAGE VESSEL

Abstract:

A pressure regulator device for use within a pressure-regulated fluid storage and dispensing vessel primarily in low flow, low delivery pressure applications. Regulator stiction challenges have been solved with an improved poppet assembly using different poppet element configurations as well as an improved bellows structure in the pressure-sensing assembly that provides more flexibility during contraction and expansion of the diaphragm elements.