Entegris, Inc.
AIRBORNE MOLECULAR CONTAMINATION FILTER CARTRIDGE SYSTEM WITH COMBUSTIBLE FILTER CARTRIDGE AND REUSABLE FRAME

Abstract:

Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.