Entegris, Inc.
HIGHLY RETENTIVE POLYAMIDE HOLLOW FIBER MEMBRANES PRODUCED VIA CONTROLLED SHRINKAGE

Abstract:

Described herein is a polyamide hollow fiber membrane and methods of making and using the hollow fiber membrane. The polyamide hollow fiber membrane has an isopropanol permeability of from about 5 L/m2 h bar to about 150 L/m2 h bar and a particle rejection percentage of about 100% for particles having a nominal diameter of from about 1 nm to about 25 nm. The polyamide hollow fiber membranes described herein are particularly useful for photoresist filtration, for example.