FARO Technologies, Inc.
ACTUATOR AND BEAM STEERING MECHANISM USING AN ACTUATOR

Abstract:

An actuator may include a stator supporting a magnet; a stationary pole; and a bobbin supporting a winding of a coil, the bobbin being coaxial with the stator and stationary pole, and positioned inside the magnet and outside the stationary core. A gap may be provided between the bobbin and the stationary pole. A beam steering mechanism may include a mirror; a frame; a pivot anchor fixed to the frame and connected to the mirror; and an actuator. An output end of the actuator may be connected to the rear surface. A beam steering mechanism may alternatively include a flexure; a mirror attached to the flexure; a frame; supports fixed to the frame and the flexure; a pivot anchor fixed to the frame and connected to the mirror or the flexure; and an actuator. An output end of the actuator may be connected to the flexure.