First Solar, Inc.
Thin-film deposition methods with thermal management of evaporation sources
Last updated:
Abstract:
In various embodiments, evaporation sources for deposition processes have disposed therearound an insulation material configurable to fit snugly around the source body of the evaporation source and to be at least partially distanced away from the source body to expedite heat transfer therefrom.
Status:
Grant
Type:
Utility
Filling date:
17 Sep 2019
Issue date:
10 May 2022