Corning Incorporated
PHASE-MODIFIED QUASI-NON-DIFFRACTING LASER BEAMS FOR HIGH ANGLE LASER PROCESSING OF TRANSPARENT WORKPIECES

Abstract:

A method for processing a transparent workpiece that includes directing a laser beam into the transparent workpiece. A portion of the laser beam directed into the transparent workpiece comprises a laser beam focal line and generates an induced absorption to produce a defect within the transparent workpiece. The laser beam focal line includes a wavelength .lamda., a spot size w.sub.o, a Rayleigh range Z.sub.R that is greater than F D .times. .pi. .times. w o 2 .lamda. , ##EQU00001## where F.sub.D is a value of 10 or greater, and an internal focal line angle of greater than 10.degree.. The laser beam focal line further comprises a circular angular spectrum within the transparent workpiece and a plurality of rays. Each individual ray of the plurality of rays has a same phase, .PHI., when converging to form the circular angular spectrum within the transparent workpiece.