Corning Incorporated
SUBSTRATE HOLDER FOR USE WITH INTERFEROMETER

Abstract:

A substrate holder for use with an interferometer comprises a first and second support each comprising a bearing land and a bearing base arranged to form a bearing pocket and a gas inlet fluidly coupled to the bearing pocket. The first support and the second support are positioned relative to one another such that the first bearing pocket is opposed to the second bearing pocket thereby forming a measurement cavity between the first support and the second support. At least one of the first support and the second support comprises reference optics through which one or more interferometric or optical measurements can be taken. Gas supplied to the first bearing pocket and gas supplied to the second bearing pocket form an air bearing in the measurement cavity for supporting a substrate in the measurement cavity without contact between the substrate, the first support, and the second support.